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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems

Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systemsAuthor: Ville Kaajakari
Publisher: Small Gear Publishing
Category: Book

List Price: $98.00
Buy New: $88.20
as of 9/6/2010 10:32 CDT details
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New (8) Used (4) from $88.20

Seller: Amazon.com
Rating: 5.0 out of 5 stars 8 reviews
Sales Rank: 321,812

Media: Hardcover
Pages: 496
Number Of Items: 1
Shipping Weight (lbs): 2.3
Dimensions (in): 10.1 x 7.1 x 1.3

ISBN: 0982299109
EAN: 9780982299104
ASIN: 0982299109

Publication Date: March 17, 2009
Shipping: Eligible for FREE Super Saver Shipping
Availability: Usually ships in 24 hours

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Editorial Reviews:

Product Description
Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include:

Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design.

Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks.

Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered.

Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications.

MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.


Customer Reviews:
Showing reviews 1-5 of 8



5 out of 5 stars Best MEMS Book Available   April 8, 2009
S. McNamara (Louisville, KY)
1 out of 1 found this review helpful

I am very happy to see this book. It covers MEMS devices. It does not cover microfabrication techniques -- there other books for that subject. It is not a survey book. This is a good book, and it is filled with a lot of useful equations. The book is also very easy to read, and it has a number of good examples. This book is perfect for someone who wants to design MEMS devices.


5 out of 5 stars Invaluable source of MEMS information   September 2, 2009
Antti Jaakkola (Helsinki, Finland)
1 out of 1 found this review helpful

As a MEMS professional I find this book an invaluable complement to the selection of MEMS textbooks - I wish this book had existed already when I started my career in the field. The book is well written, and the practical examples facilitate understanding of the subject. For me, especially the chapters on readout electronics have helped me become a better MEMS designer. I highly recommend investing in this book.


5 out of 5 stars A good book to have.   April 8, 2009
R. Waguespack
This book is good for understanding and implementing practical applications for MEMS devices. It covers many different types of devices as well as different types of sensing elements used in these devices. It has chapters covering noise in the micromechanical systems, signal amplification and noise associated with the amplifiers showing how each part affects the overall device. I think that this books is a good investment.


5 out of 5 stars Complete Coverage of MEMS   April 14, 2009
Blake M. Hosli
A relatively new addition to the MEMS arsenal of textbooks, this title seems to encapsulate just about all aspects of MEMS production, design and even some business aspects. I've used a few different MEMS textbooks and this one, even though new, works best.


5 out of 5 stars A good intro to MEMS devices, design, etc....   April 15, 2009
J. Sweeney
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.

Showing reviews 1-5 of 8



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